INFLUENCE OF SUBSTRATE-TEMPERATURE ON THE ORIENTATION OF YBA2CU3O7 FILMS

The structural characteristics of YBa2Cu3O 7 (YBCO) thin films were investigated by x-ray diffractometry. Films with good preferred orientation (001) and high Tc0 (86-90 K) can be prepared in situ using the dc magnetron sputtering method. For the films prepared on the ZrO2 (stabilized with Y2O3) substrate at a substrate temperature (Ts) less than 700°C, there are different orientations and the degree of random orientation will decrease with increasing Ts. YBCO films with (001) can be obtained on ZrO 2 with different crystal planes, such as (100), (110), and (111) at suitable temperature (760-850°C). From the results it could be concluded that the YBCO film growth with c-axis orientation mainly depends on the substrate temperature Ts.