P(VDF/TRFE) COPOLYMER FILMS FOR THE FABRICATION OF PYROELECTRIC ARRAYS

被引：23

作者：

VONMUNCH, W ^{[1
]}

NAGELE, M ^{[1
]}

RINNER, M ^{[1
]}

WOHL, G ^{[1
]}

PLOSS, B ^{[1
]}

RUPPEL, W ^{[1
]}

机构：

[1] UNIV KARLSRUHE,INST ANGEW PHYS,W-7500 KARLSRUHE,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80062-L

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Linear pyroelectric arrays with poly(vinylidene fluoride/trifluorethylene), P(VDF/TrFE), copolymer films on integrated CMOS circuits are described. The maximum specific detectivity of the sensors is of the order of 10(7) cm square-root Hz/W. A new technology for the deposition and the patterning of the copolymer layers on the readout chip is described. This device technology allows the copolymer layers to be poled on the chip.

引用

页码：365 / 369

页数：5

共 5 条

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KENNEY, JM ;

ROTH, SC .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1979, 84 (06) :447-453

[2]

KOHLER R, 1989, 17 FRUHJ TAG FERR FI

[3] PYROELECTRIC SENSOR ARRAYS ON SILICON [J].

RUPPEL, W .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 31 (1-3) :225-228

[4]

VONMUNCH W, 1991, SENSOR ACTUAT A-PHYS, V25, P167

[5] PYROELECTRIC IR SENSOR USING VINYLIDENE FLUORIDE-TRIFLUOROETHYLENE COPOLYMER FILM [J].

YAMAKA, E .

FERROELECTRICS, 1984, 57 (1-4) :337-342

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