PYROELECTRIC SENSOR ARRAYS ON SILICON

被引：12

作者：

RUPPEL, W

机构：

[1] Institut für Angewandte Physik der Universität

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 31卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(92)80109-G

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The principles and materials employed for the construction of pyroelectric sensor arrays on Si are reviewed. When a pyroelectric sensor forms part of an array on a Si-substrate. Its charge must be coupled into the read-out electronics integrated into the Si-substrate. The electrical coupling is accompanied by thermal coupling to the substrate as a heat sink, which results in it reduction of the sensitivity. Criteria for the evaluation of the performance of a sensor in an array and its limitations are discussed.

引用

页码：225 / 228

页数：4

共 15 条

[1]

BARBE DF, 1980, TOP APPL PHYS, V38, P91

[2] A SIMPLE TECHNIQUE TO INTERFACE PYROELECTRIC MATERIALS WITH SILICON SUBSTRATES FOR INFRARED DETECTION [J].