ELECTRICAL-PROPERTIES OF TI AND CR ION-IMPLANTED DIAMONDS DEPENDENT ON TARGET TEMPERATURE

被引:16
作者
SATO, S [1 ]
IWAKI, M [1 ]
SAKAIRI, H [1 ]
机构
[1] INST PHYS & CHEM RES RIKEN, WAKO, SAITAMA 35101, JAPAN
关键词
D O I
10.1016/S0168-583X(87)80164-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:822 / 825
页数:4
相关论文
共 7 条
[1]  
COLLINS AT, 1979, PROPERTIES DIAMOND, P100
[2]   ELECTRICAL-CONDUCTIVITY OF NITROGEN AND ARGON IMPLANTED DIAMOND [J].
IWAKI, M ;
SATO, S ;
TAKAHASHI, K ;
SAKAIRI, H .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1129-1133
[3]   A PERCOLATION THEORY APPROACH TO THE IMPLANTATION INDUCED DIAMOND TO AMORPHOUS-CARBON TRANSITION [J].
KALISH, R ;
BERNSTEIN, T ;
SHAPIRO, B ;
TALMI, A .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 52 (3-4) :153-168
[4]   ONSET OF HOPPING CONDUCTION IN CARBON-ION-IMPLANTED DIAMOND [J].
PRINS, JF .
PHYSICAL REVIEW B, 1985, 31 (04) :2472-2478
[5]  
SATO S, 1984, 15TH P S ION IMPL SU, P49
[6]  
VAVILOV VS, 1979, SOV PHYS SEMICOND+, V13, P635
[7]  
VAVILOV VS, 1974, SOV PHYS SEMICOND+, V8, P471