DURABILITY IMPROVEMENT OF AG-BASED LOW-EMISSIVITY COATINGS

被引:49
作者
MIYAZAKI, M
ANDO, E
机构
[1] R and D Center, Asahi Glass Co., Ltd., Kanagawa-ku, Yokohama, 221
关键词
D O I
10.1016/0022-3093(94)90292-5
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The durability of magnetron sputtered low-emissivity (Low-E) coatings composed of a silver (Ag) layer sandwiched between two layers of zinc oxide was investigated using scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray diffraction. The degradation after a humidity test at 50 degrees C, 95% relative humidity for 144 h was caused by the destruction of the top ZnO layer. It was found that sputtered ZnO films had a large internal stress and the stress was greatly reduced by the addition of a small amount of aluminium to a ZnO target or by sputtering at higher pressures. The durability of Ag-based Low-E coatings was greatly improved by reducing the internal stress of the top oxide layers.
引用
收藏
页码:245 / 249
页数:5
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