DYNAMIC IMPLANT PROFILING BY LOW-ENERGY NUCLEAR-REACTION SPECTROSCOPY

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 481 - &

[2] USE OF NUCLEAR REACTION O16(D P)O17 TO STUDY OXYGEN DIFFUSION IN SOLIDS AND APPLICATION TO ZIRCONIUM [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (05) : 2246 - &

[3] STUDY OF DEUTERIUM IMPLANTATION IN A COPPER DRIVE-IN TARGET [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 95 (02): : 221 - &

[4] DEPTH DISTRIBUTION OF IMPLANTED HELIUM AND OTHER LOW-Z ELEMENTS IN METAL-FILMS USING PROTON BACKSCATTERING [J]. APPLIED PHYSICS LETTERS, 1973, 23 (11) : 593 - 595

[5] BOHR N, 1948, KGL DANSKE VIDEN MFM, V18

[6] RECOIL CONTRIBUTION TO ION-IMPLANTATION ENERGY-DEPOSITION DISTRIBUTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) : 3385 - 3394

[7] BRICE DK, 1971, RADIAT EFF, V11, P227

[8] BRICE DK, SLA730416 SAND RES R

[9] BRICE DK, 1975, ION IMPLANTATION RAN, V1

[10] Carter G., 1968, ION BOMBARDMENT SOLI

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 481 - &

[2] USE OF NUCLEAR REACTION O16(D P)O17 TO STUDY OXYGEN DIFFUSION IN SOLIDS AND APPLICATION TO ZIRCONIUM [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (05) : 2246 - &

[3] STUDY OF DEUTERIUM IMPLANTATION IN A COPPER DRIVE-IN TARGET [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 95 (02): : 221 - &

[4] DEPTH DISTRIBUTION OF IMPLANTED HELIUM AND OTHER LOW-Z ELEMENTS IN METAL-FILMS USING PROTON BACKSCATTERING [J]. APPLIED PHYSICS LETTERS, 1973, 23 (11) : 593 - 595

[5] BOHR N, 1948, KGL DANSKE VIDEN MFM, V18

[6] RECOIL CONTRIBUTION TO ION-IMPLANTATION ENERGY-DEPOSITION DISTRIBUTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) : 3385 - 3394

[7] BRICE DK, 1971, RADIAT EFF, V11, P227

[8] BRICE DK, SLA730416 SAND RES R

[9] BRICE DK, 1975, ION IMPLANTATION RAN, V1

[10] Carter G., 1968, ION BOMBARDMENT SOLI