ULTRAVIOLET-LASER PHOTOLYSIS OF DISILANE

被引：24

作者：

MURANAKA, Y ^{[1
]}

MOTOOKA, T ^{[1
]}

LUBBEN, D ^{[1
]}

GREENE, JE ^{[1
]}

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343519

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：910 / 914

页数：5

共 20 条

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