DETECTION OF SIH2 IN SILANE AND DISILANE GLOW-DISCHARGES BY FREQUENCY-MODULATION ABSORPTION-SPECTROSCOPY

被引：44

作者：

JASINSKI, JM

WHITTAKER, EA

BJORKLUND, GC

DREYFUS, RW

ESTES, RD

WALKUP, RE

机构：

来源：

关键词：

D O I：

10.1063/1.94675

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1155 / 1157

页数：3

共 23 条

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