HIGH-RESOLUTION ABSORPTION AND EMISSION-SPECTROSCOPY OF A SILANE PLASMA IN THE 1800-2300 CM-1 RANGE

被引：89

作者：

KNIGHTS, JC

SCHMITT, JPM

PERRIN, J

GUELACHVILI, G

机构：

[1] ECOLE POLYTECH,PHYS MAT CONDENSEE LAB,F-91128 PALAISEAU,FRANCE

[2] ECOLE POLYTECH,PHYS NUCL & HAUTE ENERGIE LAB,F-91128 PALAISEAU,FRANCE

[3] ECOLE POLYTECH,PHYS MILIEUX IONISES LAB,F-91128 PALAISEAU,FRANCE

[4] CNRS,INFRA ROUGE LAB,F-91405 ORSAY,FRANCE

来源：

JOURNAL OF CHEMICAL PHYSICS | 1982年 / 76卷 / 07期

关键词：

D O I：

10.1063/1.443465

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：3414 / 3421

页数：8

相关论文

共 29 条

[1] HIGH-RESOLUTION INFRARED-SPECTRUM OF SILANE
BREGIER, R
LEPAGE, P
[J]. JOURNAL OF MOLECULAR SPECTROSCOPY, 1973, 45 (03) : 450 - 456
[2] FACTORS INFLUENCING THE EFFICIENCY OF AMORPHOUS-SILICON SOLAR-CELLS
CARLSON, DE
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 707 - 717
[3] DANGNHU M, 1978, MOL PHYS, V28, P447
[4] SUPEREXCITED STATES OF MOLECULES PRODUCED BY ELECTRON-IMPACT
DEHEER, FJ
[J]. INTERNATIONAL JOURNAL FOR RADIATION PHYSICS AND CHEMISTRY, 1975, 7 (2-3): : 137 - 153
[5] THE SPECTRUM OF SILICON HYDRIDE
DOUGLAS, AE
[J]. CANADIAN JOURNAL OF PHYSICS, 1957, 35 (01) : 71 - 77
[6] SPECTROSCOPIC IDENTIFICATION OF SIH+ MOLECULE - A1PI-CHI1SIGMA+ SYSTEM
DOUGLAS, AE
LUTZ, BL
[J]. CANADIAN JOURNAL OF PHYSICS, 1970, 48 (03) : 247 - &
[7] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE
DREVILLON, B
HUC, J
LLORET, A
PERRIN, J
DEROSNY, G
SCHMITT, JPM
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 646 - 648
[8] ABSORPTION SPECTRUM OF FREE SIH2 RADICAL
DUBOIS, I
[J]. CANADIAN JOURNAL OF PHYSICS, 1968, 46 (22) : 2485 - &
[9] DUBOIS I, 1967, J CHEM PHYS, V47, P4282
[10] HIGH-ACCURACY DOPPLER-LIMITED 106 SAMPLES FOURIER-TRANSFORM SPECTROSCOPY
GUELACHVILI, G
[J]. APPLIED OPTICS, 1978, 17 (09): : 1322 - 1326