SEMICONDUCTOR FABRICATION TECHNOLOGY APPLIED TO MICROMETER VALVES

被引：7

作者：

LEE, RA

PATEL, C

WILLIAMS, HA

CADE, NA

机构：

来源：

关键词：

D O I：

10.1109/16.43776

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2703 / 2708

页数：6

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LEE, RA ;

PATEL, C .

[3]

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[9]

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