SOFT-X-RAY DOSIMETRY AND ITS APPLICATION ON THE LITHOGRAPHY BEAMLINE AT SSRL

被引：28

作者：

SELIGSON, D ^{[1
]}

PAN, L ^{[1
]}

KING, P ^{[1
]}

PIANETTA, P ^{[1
]}

机构：

[1] STANFORD UNIV,STANFORD SYNCHROTRON RADIAT LAB,STANFORD,CA 94305

来源：

关键词：

D O I：

10.1016/0168-9002(88)90454-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：612 / 618

页数：7

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