SYNCHROTRON-BASED X-RAY-LITHOGRAPHY AT STANFORD-UNIVERSITY

[1] KING PL, IN PRESS J AM VAC SO

[2] MA TP, 1986, 3RD INT S FUT EL DEV

[3] PIANETTA P, 1985, P SOC PHOTO-OPT INST, V537, P69, DOI 10.1117/12.947487

[4] Pianetta P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P393

[5] SOFT-X-RAY DOSIMETRY AND ITS APPLICATION ON THE LITHOGRAPHY BEAMLINE AT SSRL [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1988, 266 (1-3) : 612 - 618

[6] SHIMKUNAS AR, 1984, SOLID STATE TECH SEP, P192

[7] SOFT-X-RAY MICROSCOPY-LITHOGRAPHY BRANCH LINE AT SSRL [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 172 (1-2): : 387 - 391

[1] KING PL, IN PRESS J AM VAC SO

[2] MA TP, 1986, 3RD INT S FUT EL DEV

[3] PIANETTA P, 1985, P SOC PHOTO-OPT INST, V537, P69, DOI 10.1117/12.947487

[4] Pianetta P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P393

[5] SOFT-X-RAY DOSIMETRY AND ITS APPLICATION ON THE LITHOGRAPHY BEAMLINE AT SSRL [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1988, 266 (1-3) : 612 - 618

[6] SHIMKUNAS AR, 1984, SOLID STATE TECH SEP, P192

[7] SOFT-X-RAY MICROSCOPY-LITHOGRAPHY BRANCH LINE AT SSRL [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 172 (1-2): : 387 - 391