EARLY STAGES OF THE ALKALI-METAL-PROMOTED OXIDATION OF SILICON

被引：111

作者：

MICHEL, EG

ORTEGA, JE

OELLIG, EM

ASENSIO, MC

FERRON, J

MIRANDA, R

机构：

来源：

PHYSICAL REVIEW B | 1988年 / 38卷 / 18期

关键词：

D O I：

10.1103/PhysRevB.38.13399

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：13399 / 13406

页数：8

共 29 条

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