EFFECT OF DEPOSITION PARAMETERS ON THE DEPOSITION CHARACTERISTICS OF CHEMICALLY VAPOR-DEPOSITED PBTIO3

被引：5

作者：

YOON, SG

KIM, HG

机构：

来源：

THIN SOLID FILMS | 1988年 / 165卷 / 01期

关键词：

D O I：

10.1016/0040-6090(88)90700-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：291 / 302

页数：12

共 11 条

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