A NOVEL METHOD OF ELECTRON-BEAM RECORDING ON A SI WAFER

被引：8

作者：

MUNAKATA, C

MIYAZAKI, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 04期

关键词：

D O I：

10.1143/JJAP.20.L293

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L293 / L295

页数：3

共 12 条

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