INVESTIGATION OF METAL-INSULATOR-SEMICONDUCTOR STRUCTURES WITH AL2O3 INSULATING LAYERS OBTAINED BY ELECTRON-GUN EVAPORATION

被引：6

作者：

LECONTELLEC, M

MORIN, F

机构：

来源：

THIN SOLID FILMS | 1978年 / 52卷 / 01期

关键词：

D O I：

10.1016/0040-6090(78)90255-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：63 / 68

页数：6

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