PLASMA DIAGNOSTIC MEASUREMENTS IN THE CRYOGENICALLY COOLED GLOW-DISCHARGE

被引：18

作者：

OHORODNIK, SK ^{[1
]}

HARRISON, WW ^{[1
]}

机构：

[1] UNIV FLORIDA,DEPT CHEM,POB 117200,GAINESVILLE,FL 32611

来源：

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY | 1994年 / 9卷 / 09期

关键词：

GLOW DISCHARGE; CRYOGENIC COOLING; EXCITATION TEMPERATURE; ROTATIONAL TEMPERATURE; PLASMA DIAGNOSTIC;

D O I：

10.1039/ja9940900991

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Cryogenic cooling is an effective method for the removal of impurity species (water vapour) from the glow discharge. Plasma diagnostic measurements were performed in order to study the effect of cryogenic cooling on plasma processes in the glow discharge source. The fundamental plasma processes were investigated by using optical temperature measurements from Fe+ excitation and N2+ rotational emission spectra and physical temperature measurements using a thermocouple probe. Fe+ excitation temperatures were 3500-3900 K. The N2+ rotational temperatures varied between 500-620 K, while the thermocouple temperatures varied between 380-430 K. For all the diagnostic measurements, lower temperatures (about 50-300 K lower) were measured for the cryogenically cooled glow discharge system.

引用

页码：991 / 996

页数：6

共 25 条

[1] COMPARISON OF TEMPERATURE-MEASUREMENTS IN ICP AND MIP WITH AR AND HE AS PLASMA GAS [J].

ABDALLAH, MH ;

MERMET, JM .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1982, 37 (05) :391-397

[2] OPTICAL AND LANGMUIR PROBE INVESTIGATIONS OF EXCITATION TEMPERATURES IN A LOW-PRESSURE GLOW-DISCHARGE WITH VARIATIONS IN DISCHARGE GAS IDENTITY [J].

ANGSTADT, AD ;

WHELAN, J ;

HESS, KR .

MICROCHEMICAL JOURNAL, 1993, 47 (1-2) :206-223

[3]

BASTIEN F, 1983, ELECTRICAL BREAKDOWN, pCH7

[4] TEMPERATURE AND ELECTRON-DENSITY MEASUREMENTS IN A DC GLOW-DISCHARGE [J].

BRACKETT, JM ;

MITCHELL, JC ;

VICKERS, TJ .

APPLIED SPECTROSCOPY, 1984, 38 (02) :136-140

[5] SIMPLIFIED SOLIDS MASS-SPECTROMETER COMBINING A GLOW-DISCHARGE SOURCE WITH A QUADRUPOLE MASS FILTER [J].

BRUHN, CG ;

BENTZ, BL ;

HARRISON, WW .

ANALYTICAL CHEMISTRY, 1978, 50 (02) :373-375

[6] SPECTROSCOPIC INVESTIGATIONS OF PLASMA OF A GLOW-DISCHARGE LAMP [J].

BUGER, PA .

ZEITSCHRIFT FUR NATURFORSCHUNG SECTION A-A JOURNAL OF PHYSICAL SCIENCES, 1975, A 30 (02) :216-222

[7]

CABANNES F, 1971, REACTIONS PLASMA CON, pCH7

[8] ISOTOPIC MEASUREMENTS OF PALLADIUM METAL CONTAINING PROTIUM AND DEUTERIUM BY GLOW-DISCHARGE MASS-SPECTROMETRY [J].

DONOHUE, DL ;

PETEK, M .

ANALYTICAL CHEMISTRY, 1991, 63 (07) :740-744

[9] USE OF A CYLINDRICAL LANGMUIR PROBE FOR THE CHARACTERIZATION OF CHARGED-PARTICLE POPULATIONS IN A PLANAR, DIODE GLOW-DISCHARGE DEVICE [J].

FANG, D ;

MARCUS, RK .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1990, 45 (09) :1053-1074

[10] GLOW-DISCHARGE SPUTTERING AND EXCITATION CHARACTERISTICS OF BRASS ALLOYS [J].

FANG, DC ;

MARCUS, RK .

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1988, 3 (06) :873-878

← 1 2 3 →