EFFECT OF EARLY SOLVENT EVAPORATION ON THE MECHANISM OF THE SPIN-COATING OF POLYMERIC SOLUTIONS

被引:28
作者
SKROBIS, KJ [1 ]
DENTON, DD [1 ]
SKROBIS, AV [1 ]
机构
[1] UNIV WISCONSIN,MAT SCI PROGRAM,MADISON,WI 53706
关键词
D O I
10.1002/pen.760300309
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
The effect of solvent evaporation on spun‐on polymer thickness is investigated. Film thickness is shown to be proportional to spin speed raised to the negative of a constant, b. This constant is specifically considered. Of particular interest is the short initial period during spin coating signified by a rapid increase in solution viscosity, but where solvent diffusion in solution is not yet significant. Many previous theories have suggested the existence of a single value for b dependent only upon environment and spin coating system. Here, a single polymer dissolved in five pure solvents is examined. The polymer is Thermid IP‐600 (National Starch and Chemical Co.), an isoimide precursor. The solvents considered are n‐methyl‐2‐pyrrolidinone, dimethyl sulfoxide, dimethyl formamide, ethylene glycol dimethyl ether, and 2‐methoxyethyl ether. Spin Speed ranges from 0.6 to 7.0 kRPM and spin time is held at 15 s. It is shown that b varies from 0.97 for n‐methyl‐2‐pyrrolidinone to 0.57 for 2‐tncthoxycthyl ether. An empirical relation describing the behavior of b for this particular polymer and spin conditions used is b = [(MW)s(Pvap)s]/[(MW)n(Pvap)n]−0.1, where (MW)s and (MW)n are the molecular weights of the solvent and of n‐butyl acetate, respectively and where (PVaP)s and (Pvap)n are the vapor pressure of the pure solvent and the vapor pressure of n‐butyl acetate, respectively. Copyright © 1990 Society of Plastics Engineers
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页码:193 / 196
页数:4
相关论文
共 15 条
[1]  
BORNSIDE DE, 1987, SOC IMAGING SCI TECH, V13, P122
[3]   The flow due to a rotating disc. [J].
Cochran, WG .
PROCEEDINGS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1934, 30 :365-375
[4]  
DENTON DD, 1988, INTERNAL B SPIN COAT
[5]   FLOW OF A VISCOUS LIQUID ON A ROTATING DISK [J].
EMSLIE, AG ;
BONNER, FT ;
PECK, LG .
JOURNAL OF APPLIED PHYSICS, 1958, 29 (05) :858-862
[6]   POLYMER COATINGS - CONCEPTS OF SOLVENT EVAPORATION PHENOMENA [J].
HANSEN, CM .
INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT, 1970, 9 (03) :282-&
[7]   EFFECTS OF SOLVENT MASS-TRANSFER ON FLOW OF POLYMER-SOLUTIONS ON A FLAT ROTATING-DISK [J].
JENEKHE, SA .
INDUSTRIAL & ENGINEERING CHEMISTRY FUNDAMENTALS, 1984, 23 (04) :425-432
[8]  
JENEKHE SA, 1987, POLYM HIGH TECHNOLOG
[9]   INVESTIGATION OF SPIN COATING OF ELECTRON RESISTS [J].
LAI, JH .
POLYMER ENGINEERING AND SCIENCE, 1979, 19 (15) :1117-1121
[10]   TRANSIENT-BEHAVIOR OF SPIN-COATED RESIST FILM THICKNESS BASED ON INVARIANCE OF VISCOUS-FLUID UNDER SIMILARITY TRANSFORMATION [J].
MATSUBA, I ;
MATSUMOTO, K .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (09) :1263-1269