INVESTIGATION OF THE SOLVENT-EVAPORATION EFFECT ON SPIN COATING OF THIN-FILMS

被引：96

作者：

CHEN, BT

机构：

来源：

POLYMER ENGINEERING AND SCIENCE | 1983年 / 23卷 / 07期

关键词：

D O I：

10.1002/pen.760230706

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

收藏

页码：399 / 403

页数：5

相关论文

共 6 条

[1] DAMON GF, 1966, 2ND P KOD SEM MICR
[2] INVESTIGATION OF SPIN COATING OF ELECTRON RESISTS
LAI, JH
[J]. POLYMER ENGINEERING AND SCIENCE, 1979, 19 (15) : 1117 - 1121
[3] Lange N. A., 1967, HDB CHEM
[4] CHARACTERISTICS OF RESIST FILMS PRODUCED BY SPINNING
MEYERHOFER, D
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) : 3993 - 3997
[5] RHEOLOGY AND MODELING OF SPIN COATING PROCESS
WASHO, BD
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1977, 21 (02) : 190 - 198
[6] 1980, HDB CHEM PHYSICS