CHARACTERISTICS OF RESIST FILMS PRODUCED BY SPINNING

被引：562

作者：

MEYERHOFER, D

机构：

来源：

关键词：

D O I：

10.1063/1.325357

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3993 / 3997

页数：5

共 8 条

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[4] DAMON GF, 1967, 2ND P KOD SEM MICR, P36
[5] FLOW OF A VISCOUS LIQUID ON A ROTATING DISK
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[8] RHEOLOGY AND MODELING OF SPIN COATING PROCESS
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[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1977, 21 (02) : 190 - 198