FAST VERSATILE OPTICAL PROFILOMETER

被引：21

作者：

ARECCHI, FT ^{[1
]}

BERTANI, D ^{[1
]}

CILIBERTO, S ^{[1
]}

机构：

[1] IST NAZL OTT,FIRENZE,ITALY

来源：

OPTICS COMMUNICATIONS | 1979年 / 31卷 / 03期

关键词：

D O I：

10.1016/0030-4018(79)90193-7

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a new optical profilometer for the measurement of surface roughness of workpieces form the submicrometer range up to several tens of micrometers. The device has speed and sensitivity characteristics better than mechanical profilometers. It overcomes the randomness requirements which limit the use of optical devices working on angular diagrams or speckle correlation measurements. © 1979.

引用

页码：263 / 266

页数：4

共 12 条

[1] ARECCHI FT, UNPUBLISHED
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JENKINSON, HA
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[7] EFFECT OF SURFACE-ROUGHNESS ON STATISTICAL DISTRIBUTION OF IMAGE SPECKLE INTENSITY
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[J]. OPTICS COMMUNICATIONS, 1974, 11 (01) : 35 - 38
[8] SURFACE-ROUGHNESS MEASUREMENTS BY MEANS OF SPECKLE WAVELENGTH DECORRELATION
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MUSAZZI, S
PERINI, U
[J]. OPTICS COMMUNICATIONS, 1979, 28 (02) : 166 - 170
[9] DEPENDENCE OF IMAGE SPECKLE CONTRAST ON SURFACE-ROUGHNESS
GOODMAN, JW
[J]. OPTICS COMMUNICATIONS, 1975, 14 (03) : 324 - 327
[10] MILANA E, H2061 FIAT CTR RIC R

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