SURFACE-ROUGHNESS MEASUREMENTS BY MEANS OF SPECKLE WAVELENGTH DECORRELATION

被引：25

作者：

GIGLIO, M

MUSAZZI, S

PERINI, U

机构：

[1] CISE, 20100 Milano

来源：

OPTICS COMMUNICATIONS | 1979年 / 28卷 / 02期

关键词：

D O I：

10.1016/0030-4018(79)90259-1

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We exploit speckle wavelength decorrelation techniques for the characterization of surface roughness up to a few microns. The experimental setup includes an argon laser, a grating, two photodetectors, and a commercial cross correlator. Experimental results are compared with data obtained with a stylus instrument. Fair agreement is observed. © 1979.

引用

页码：166 / 170

页数：5

共 20 条

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