X-RAY-DIFFRACTION DETERMINATION OF INTERFACIAL ROUGHNESS CORRELATION IN SIXGE1-X/SI AND GAAS/ALXGA1-XAS SUPERLATTICES

被引：18

作者：

PHANG, YH

SAVAGE, DE

KUECH, TF

LAGALLY, MG

PARK, JS

WANG, KL

机构：

[1] UNIV WISCONSIN,MADISON,WI 53706

[2] UNIV CALIF LOS ANGELES,LOS ANGELES,CA 90024

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 24期

关键词：

D O I：

10.1063/1.106784

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Vertically correlated roughness in SixGe1-x/Si and GaAs/AlxGa1-xAs superlattice films has been investigated. In all films, a significant fraction of the total roughness is correlated with lateral correlation lengths from approximately 1000 to approximately 4500 angstrom.

引用

页码：2986 / 2988

页数：3

共 16 条

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