QUANTITATIVE-EVALUATION OF THE PERFECTION OF AN EPITAXIAL FILM GROWN BY VAPOR-DEPOSITION AS DETERMINED BY THERMAL-ENERGY ATOM SCATTERING

被引：73

作者：

DEMIGUEL, JJ

CEBOLLADA, A

GALLEGO, JM

FERRON, J

FERRER, S

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 88卷 / 04期

关键词：

D O I：

10.1016/0022-0248(88)90143-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：442 / 454

页数：13

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