CHEMICAL-VAPOR-DEPOSITION OF METAL-CONTAINING THIN-FILM MATERIALS FROM ORGANOMETALLIC COMPOUNDS

被引：87

作者：

SPENCER, JT ^{[1
]}

机构：

[1] SYRACUSE UNIV, WM KECK CTR MOLEC ELECTR, SYRACUSE, NY USA

来源：

PROGRESS IN INORGANIC CHEMISTRY, VOL 41 | 1994年 / 41卷

关键词：

D O I：

10.1002/9780470166420.ch3

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

引用

页码：145 / 237

页数：93

共 625 条

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