SMALL-SCALE REACTOR FOR PLASMA PROCESSING OF MOVING SUBSTRATE WEB

被引：151

作者：

GRIESSER, HJ

机构：

来源：

关键词：

D O I：

10.1016/0042-207X(89)90272-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：485 / 488

页数：4

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