UPDATE ON THE COMPACT SYNCHROTRON X-RAY SOURCE HELIOS

被引：3

作者：

WILSON, MN ^{[1
]}

SMITH, AIC ^{[1
]}

KEMPSON, VC ^{[1
]}

PURVIS, AL ^{[1
]}

ANDERSON, RJ ^{[1
]}

TOWNSEND, MC ^{[1
]}

JORDEN, AR ^{[1
]}

ANDREWS, DE ^{[1
]}

SULLER, VP ^{[1
]}

POOLE, MW ^{[1
]}

机构：

[1] SERC,DARESBURY LAB,WARRINGTON WA4 4AD,CHESHIRE,ENGLAND

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 11期

关键词：

SYNCHROTRON RADIATION; SUPERCONDUCTING MAGNET; STORAGE RING; X-RAY LITHOGRAPHY; CRYOGENIC;

D O I：

10.1143/JJAP.29.2620

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Helios is a compact superconducting Synchrotron X-ray source designed specifically for lithography. It will produce a total X-ray power of 8.2 kW when the design stored beam of 200 mA is achieved. The first phase of commissioning has just been completed in less than 2 months. A stored beam of 305 mA has been accumulated at the injection energy of 200 MeV and 55 mA has been accelerated to the full energy of 700 MeV.

引用

页码：2620 / 2624

页数：5