OPTICAL-CONSTANTS OF SILICON FILMS DEPOSITED BY THE R.F. GLOW-DISCHARGE OF SICL4

被引：15

作者：

AUGELLI, V

MURRI, R

SCHIAVULLI, L

BRUNO, G

CAPEZZUTO, P

CRAMAROSSA, F

EVANGELISTI, F

FORTUNATO, G

机构：

[1] UNIV BARI,IST CHIM GEN & INORGAN,CNR,CTR STUDIO CHIM PLASMI,I-70124 BARI,ITALY

[2] UNIV ROME,IST FIS,CNR,NAZIONALE STRUTTURA MAT GRP,I-00100 ROME,ITALY

来源：

关键词：

D O I：

10.1016/0040-6090(81)90344-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：359 / 367

页数：9

共 18 条

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