共 23 条
- [1] ABROYAN IA, 1976, IZV AN SSSR P, V40, P1746
- [2] ABROYAN IA, 1979, SOV PHYS SEMICOND, V11, P712
- [4] ALHASHMI SAR, COMMUNICATION
- [7] Carter G., 1976, ION IMPLANTATION SEM
- [8] CHERNOW F, 1976, ION IMPLANTATION SEM
- [9] DENNIS JR, 1976, J APPL PHYS, V43, P3499
- [10] EISEN FH, 1970, P EUROPEAN C ION IMP, V1, P227