DYNAMICAL METHOD FOR THE THERMOMECHANICAL STUDY OF THIN MEMBRANES

被引：20

作者：

BERRY, BS ^{[1
]}

PRITCHET, WC ^{[1
]}

UZOH, CE ^{[1
]}

机构：

[1] IBM CORP,GTD,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584490

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1565 / 1569

页数：5

共 8 条

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BERRY, BS
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[2] VIBRATING REED INTERNAL-FRICTION APPARATUS FOR FILMS AND FOILS
BERRY, BS
PRITCHET, WC
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1975, 19 (04) : 334 - 343
[3] BERRY BS, 1988, DIFFUSION PHENOMENA, P88
[4] BERRY BS, 1989, J ELECTROCHEM, V136, pC114
[5] EFFECTS OF STRESS ON THE STABILITY OF X-RAY MASKS
KARNEZOS, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 226 - 229
[6] RAYLEIGH, 1945, THEORY SOUND, pCH9
[7] UZOH C, 1987, J VAC SCI TECHNOL B, V5, P226
[8] MECHANICAL CHARACTERIZATION OF MEMBRANES FOR X-RAY-LITHOGRAPHY MASKS
UZOH, CE
MALDONADO, JR
DANA, SS
ACOSTA, R
BABICH, I
VLADIMIRSKY, O
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2178 - 2183