EPITAXIAL-GROWTH OF PBTE ON (100) GAAS SUBSTRATES

被引:6
作者
CLEMENS, H [1 ]
OFNER, P [1 ]
BAUER, G [1 ]
HONG, JM [1 ]
CHANG, LL [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1016/0167-577X(88)90167-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:127 / 130
页数:4
相关论文
共 11 条
[1]  
BIS RF, 1972, NAVAL ORDNANCE LABOR
[2]   SEMICONDUCTING AND OTHER MAJOR PROPERTIES OF GALLIUM-ARSENIDE [J].
BLAKEMORE, JS .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) :R123-R181
[3]   GROWTH AND CHARACTERIZATION OF PBTE EPITAXIAL-FILMS GROWN BY HOT-WALL EPITAXY [J].
CLEMENS, H ;
FANTNER, EJ ;
RUHS, W ;
BAUER, G .
JOURNAL OF CRYSTAL GROWTH, 1984, 66 (02) :251-256
[4]  
CLEMENS H, IN PRESS SUPERLATTIC
[5]  
CLEMENS H, IN PRESS
[6]   PHASE RELATIONS AND TRANSFORMATIONS IN SYSTEM PBTE-GETE [J].
HOHNKE, DK ;
HOLLOWAY, H ;
KAISER, S .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1972, 33 (11) :2053-&
[7]  
Holloway H., 1980, Molecular beam epitaxy, P49
[8]   HOT WALL EPITAXY [J].
LOPEZOTERO, A .
THIN SOLID FILMS, 1978, 49 (01) :3-57
[10]  
SEGMULLER A, 1986, ANAL TECHNIQUES THIN