ELECTRON IRRADIATION EFFECT IN QUANTITATIVE AUGER ANALYSIS OF PSG

被引：4

作者：

INOUE, T ^{[1
]}

机构：

[1] TOKYO SHIBAURA ELECT CO LTD,TOSHIBA RES & DEV CTR,KAWASAKI 210,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1977年 / 16卷 / 05期

关键词：

D O I：

10.1143/JJAP.16.851

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：851 / 852

页数：2

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[4] STRAUSSER YE, 1976, NBS40023 SPEC PUBL, P125
[5] ELECTRON-IRRADIATION EFFECT IN AUGER ANALYSIS OF SIO2
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