REACTION-MECHANISMS IN THE ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH OF GAAS

被引：135

作者：

LARSEN, CA ^{[1
]}

BUCHAN, NI ^{[1
]}

STRINGFELLOW, GB ^{[1
]}

机构：

[1] UNIV UTAH,DEPT ELECT ENGN,SALT LAKE CITY,UT 84112

来源：

关键词：

D O I：

10.1063/1.99450

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：480 / 482

页数：3

共 17 条

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[2] ELUCIDATION OF THE ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH MECHANISM FOR INP
BUCHAN, NI
LARSEN, CA
STRINGFELLOW, GB
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[3] BUCHAN NI, UNPUB
[4] BUCHAN NI, IN PRESS J CRYST GRO
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[6] HOMOGENEOUS AND HETEROGENEOUS THERMAL-DECOMPOSITION RATES OF TRIMETHYLGALLIUM AND ARSINE AND THEIR RELEVANCE TO THE GROWTH OF GAAS BY MOCVD
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LEE, HC
[J]. JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 188 - 193
[7] FROLOV IA, 1977, INORG MATER+, V13, P632
[8] FROLOV IA, 1977, RUSSIAN J PHYS CHEM, V51, P651
[9] PYROLYSIS OF TRIMETHYL GALLIUM
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[10] KEUCH TF, 1986, J CRYST GROWTH, V77, P257