OXIDATION RATE REDUCTION IN THE SUBMICROMETER LOCOS PROCESS

被引：23

作者：

MIZUNO, T

SAWADA, S

MAEDA, S

SHINOZAKI, S

机构：

来源：

关键词：

D O I：

10.1109/T-ED.1987.23228

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2255 / 2259

页数：5

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