HIGH-RESOLUTION TECHNOLOGY FOR SILICON-INTEGRATED SURFACE ACOUSTIC-WAVE DEVICES

被引：1

作者：

BLOK, BM ^{[1
]}

VISSER, JH ^{[1
]}

VANDERDRIFT, E ^{[1
]}

ROMIJN, J ^{[1
]}

VENEMA, A ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,FAC ELECT ENGN,DELFT,NETHERLANDS

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584646

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2048 / 2052

页数：5

共 15 条

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[J]. APPLIED PHYSICS LETTERS, 1986, 48 (13) : 835 - 837
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[7] Morgan D., 1985, STUDIES ELECT ELECT
[8] SAW RESONATOR DESIGN AND FABRICATION FOR 2.0, 2.6, AND 3.3 GHZ
PENDERGRASS, LL
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[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1988, 35 (03) : 372 - 379
[9] VANDERBERG HAM, 1977, P IEEE ULTRASONICS S, P767
[10] VANDERDRIFT E, 1986, MICROCIRCUIT ENG, P257