INTERPRETATION AND CONTROL OF C-V MEASUREMENTS USING PATTERN-RECOGNITION AND EXPERT SYSTEM TECHNIQUES

被引：5

作者：

WALLS, JA

WALTON, AJ

ROBERTSON, JM

机构：

[1] Digital Equipment Scotland, Ltd., Headrig Road, South Queensferry

[2] Edinburgh Microfabrication Facility, Department of Electrical Engineering, The Kings’ Buildings, Mayfield Road, Edinburgh

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1991年 / 4卷 / 03期

关键词：

D O I：

10.1109/66.85947

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Pattern-recognition and knowledge-based techniques have been applied to help extract the maximum amount of information from C-V measurements. This has been implemented by integrating conventional, algorithmic instrument control software with an expert system shell to intelligently sequence tests to enhance conventional CV, GV, C-t, and QSCV measurements. This approach ensures that the measurement sequence is appropriately tailored to the particular characteristics of the MOS capacitor test structure under investigation.

引用

页码：250 / 262

页数：13

共 24 条

[11] Manly B.F.J., Multivariate Statistical Methods—A Primer, (1986)
[12] Hand D.J., Discrimination and Classification, (1981)
[13] Bow S.-T., Pattern Recognition—Applications to Large Data-Set Problems, (1984)
[14] Walls J.A., Walton A.J., Robertson J.M., The application of AI techniques to the control and interpretation of C-V measurements, Proceedings ICMTS 1990, 3, pp. 205-210, (1990)
[15] McGillivray I.G., Robertson J.M., Walton A.J., Improved measurement of doping profiles in silicon using C-V techniques, IEEE Trans. Electron Devices, ED-35, 2, pp. 174-179, (1988)
[16] Automatic measurement of minority carrier lifetimes in silicon for nonuniform doping samples using the Zerbst technique, IEEE Proc.—I: Solid State and Electron Devices, 134, pp. 161-167, (1987)
[17] Lebow L., Blankenship G.L., A microcomputer-based expert controller for industrial applications, Knowledge-Based Expert Systems for Engineering: Classification, Education and Control, (1987)
[18] Walls J.A., Walton A.J., Edinburgh University CApacitor TEst Software (EDUCATES)—A User Guide, EMF Internal Rep., (1989)
[19] Using the BASIC/UX System on HP 9000 Series 300 Computers, (1988)
[20] Jones J., Millington M., Ross P., A blackboard shell in prolog, Proc. of EC AI’86, (1986)

← 1 2 3 →