GRAZING-INCIDENCE OPTICS FOR SOFT-X-RAY MICROSCOPY

被引：27

作者：

VOSS, J

KUNZ, C

MOEWES, A

STORJOHANN, I

机构：

[1] II. Institut für Experimentalphysik, Universität Hamburg, D-2000 Hamburg 50

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1142707

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed and brought into operation a new type of scanning soft x-ray microscope basing on a grazing incidence mirror. A ring shaped ellipsoidal mirror serves as a nonimaging but concentrating optical element to produce a microfocus. The specimen is mechanically scanned, and the image is recorded a pixel at a time. Transmission, total photoelectron yield, photoelectron spectroscopy, fluorescence, and stimulated desorption of ions and neutrals can provide information in the range of photon energies between 20 and 1300 eV. While the smallest spatially resolved structure, limited by the mirror imperfections, has a size of 0.4-mu-m, the minimum diameter of selected areas necessary for photoelectron microspectroscopy presently is about 4-mu-m.

引用

页码：569 / 573

页数：5

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