APPLICATION OF AES-SIMS (IMA)-FDS COMBINED SYSTEMS TO PHYSICAL AND CHEMICAL SPUTTERING PROCESSES OF GRAPHITE AND SILICON-CARBIDE SURFACES WITH ENERGETIC IONS

被引：12

作者：

YAMASHINA, T

MOHRI, M

WATANABE, K

DOI, H

HAYAKAWA, K

机构：

来源：

JOURNAL OF NUCLEAR MATERIALS | 1978年 / 76-7卷 / 1-2期

关键词：

D O I：

10.1016/0022-3115(78)90138-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：202 / 203

页数：2

相关论文

共 2 条

[1] MEASUREMENT OF EROSION YIELDS FOR A SIC SURFACE OF H+, D+ AND AR+ BOMBARDMENT
MOHRI, M
WATANABE, K
YAMASHINA, T
DOI, H
HAYAKAWA, K
[J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 75 (02) : 309 - 311
[2] SPUTTERING PROCESS OF A SILICON-CARBIDE SURFACE WITH ENERGETIC IONS BY MEANS OF AN AES-SIMS-FDS COMBINED SYSTEM
MOHRI, M
WATANABE, K
YAMASHINA, T
[J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 75 (01) : 7 - 13