SHEET PLASMA PRODUCTION BY MEANS OF RF MAGNETRON DISCHARGES

被引：10

作者：

OKUNO, Y

ISHIKURA, H

FUJITA, H

机构：

[1] Department of Electrical Engineering, Saga University, Saga 840

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.1143604

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A production technique for sheet plasma with a radio frequency (rf, 13.56 MHz) magnetron discharge source is proposed. The magnetron discharge was realized inside the rf-excited electrode of rectangular hollow type with a magnetic field which also maintained the plasma sheet geometry. The typical density and temperature of electrons in the sheet plasma was 4.3 X 10(10) cm-3 and 1.8 eV, respectively, at the gas pressure of 5 mTorr and the magnetic flux density of 0.3 kG. A comparison with the sheet plasma produced by a dc magnetron discharge source, which we proposed previously, is also given.

引用

页码：3725 / 3728

页数：4

共 7 条

[1]

AZUMA R, 1990, 7TH P S PLASM PROC, P317

[2]

Chen F F, 1965, PLASMA DIAGNOSTIC TE, P113

[3] RADIAL POTENTIAL FORMATION WITH UNSTABLE WAVES IN MAGNETIZED COAXIAL CYLINDRICAL DOUBLE PLASMAS [J].