STUDIES OF THE MECHANISM OF THE DECOMPOSITION OF HYDROGENATED A-SI FILMS

被引：39

作者：

JOHN, P ^{[1
]}

ODEH, IM ^{[1
]}

THOMAS, MJK ^{[1
]}

TRICKER, MJ ^{[1
]}

RIDDOCH, F ^{[1
]}

WILSON, JIB ^{[1
]}

机构：

[1] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH EH14 4AS,MIDLOTHIAN,SCOTLAND

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1980年 / 42卷 / 05期

关键词：

D O I：

10.1080/01418638008224033

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：671 / 681

页数：11

共 16 条

[1]

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[2] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON [J].

BRODSKY, MH ;

FRISCH, MA ;

ZIEGLER, JF ;

LANFORD, WA .

APPLIED PHYSICS LETTERS, 1977, 30 (11) :561-563

[3] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1978, 18 (08) :4288-4300

[4] THERMAL DEHYDROGENATION OF GLOW-DISCHARGE A-SI [J].

JOHN, P ;

ODEH, M ;

THOMAS, MJK ;

TRICKER, MJ ;

MCGILL, J ;

WALLACE, A ;

WILSON, JIB .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :237-241

[5]

JOHN PK, UNPUBLISHED

[6]

Knights J. C., 1979, JPN J APPL PHYS, V18, P101

[7]

KNIGHTS JC, 1978, PHILOS MAG B, V37, P469

[8]

KNIGHTS JC, 1979, 10TH P INT C SOL STA

[9] STRUCTURAL INTERPRETATION OF THE VIBRATIONAL-SPECTRA OF A-SI-H ALLOYS [J].

LUCOVSKY, G ;

NEMANICH, RJ ;

KNIGHTS, JC .

PHYSICAL REVIEW B, 1979, 19 (04) :2064-2073

[10] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J].

LUCOVSKY, G .

SOLID STATE COMMUNICATIONS, 1979, 29 (08) :571-576

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