LATTICE LOCATION AND DOPANT BEHAVIOR OF GROUP-II AND GROUP-VI ELEMENTS IMPLANTED IN SILICON

被引:10
作者
MEYER, O
JOHANSSON, NG
PICRAUX, ST
MAYER, JW
机构
关键词
D O I
10.1016/0038-1098(70)90297-8
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
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页码:529 / +
页数:1
相关论文
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