ORDERED STRUCTURES IN EPITAXIAL NICKEL SILICIDE FILMS GROWN ON (111) SILICON SUBSTRATES

被引:1
作者
HO, HL
MAHAJAN, S
BAUER, CL
LAUGHLIN, DE
机构
[1] Department of Metallurgical Engineering and Materials Science, Carnegie Mellon University, Pittsburgh
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1991年 / 10卷 / 02期
基金
美国安德鲁·梅隆基金会;
关键词
D O I
10.1016/0921-5107(91)90116-D
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The initial stages in the formation of epitaxial nickel silicide films resulting from the interdiffusion of nickel thin films (about 100 nm thick) into (111)-oriented silicon substrates have been studied using transmission electron microscopy. We report herein the formation of three ordered metastable epitaxial nickel silicide phases after short annealing treatments (about 10 min at 825-degrees-C) that have been identified through selected-area electron diffraction, superlattice dark field imaging and X-ray microanalysis. It is argued that the observed metastable ordered phases are derivative structures of the CaF2 structure and that these structures serve as transition phases for the formation of the cubic NiSi2 phase.
引用
收藏
页码:107 / 115
页数:9
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