COPPER METALLIZATION TECHNOLOGY FOR DEEP-SUBMICRON ULSIS

[21] NORMAN JAT, 1994, ADV METALLIZATION UL, P57

[22] OHNO K, 1993, P S INTERCONNECTS CO, P316

[23] OHNO K, 1990, SOLID STATE DEVICES, P215

[24] OHNO K, 1989, SOLID STATE DEVICES, P157

[25] PETERSON GA, 1993, ELECTROCHEM SOC, V9325, P225

[26] SAITO N, 1994, 41ST SPRING M JPN SO, P736

[27] SATO M, 1992, JPN J APPL PHYS, V32, P3013

[28] Shin H. K., 1992, Advanced Metallization for ULSI Applications (Formerly Workshop on Tungsten and Other Advanced Metals for ULSI Applications) Proceedings of the Conference, P403

[29] USAMI T, 1993, SEMICONDUCTOR WO DEC, P164

[30] UTTECHT RR, 1991, 8TH P VLSI MULT INT, P20

[21] NORMAN JAT, 1994, ADV METALLIZATION UL, P57

[22] OHNO K, 1993, P S INTERCONNECTS CO, P316

[23] OHNO K, 1990, SOLID STATE DEVICES, P215

[24] OHNO K, 1989, SOLID STATE DEVICES, P157

[25] PETERSON GA, 1993, ELECTROCHEM SOC, V9325, P225

[26] SAITO N, 1994, 41ST SPRING M JPN SO, P736

[27] SATO M, 1992, JPN J APPL PHYS, V32, P3013

[28] Shin H. K., 1992, Advanced Metallization for ULSI Applications (Formerly Workshop on Tungsten and Other Advanced Metals for ULSI Applications) Proceedings of the Conference, P403

[29] USAMI T, 1993, SEMICONDUCTOR WO DEC, P164

[30] UTTECHT RR, 1991, 8TH P VLSI MULT INT, P20