A 2-TEMPERATURE MODEL OF THE INDUCTIVELY COUPLED RF-PLASMA

被引：143

作者：

MOSTAGHIMI, J

PROULX, P

BOULOS, MI

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 05期

关键词：

D O I：

10.1063/1.338073

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1753 / 1760

页数：8

共 30 条

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[7]

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