ADHESION MEASUREMENT OF THIN-FILMS ON GLASS SUBSTRATES

被引：14

作者：

KINBARA, A ^{[1
]}

BABA, S ^{[1
]}

KIKUCHI, A ^{[1
]}

KAJIWARA, T ^{[1
]}

WATANABE, K ^{[1
]}

机构：

[1] MITSUBISHI ELECT CORP,OFUNA 247,JAPAN

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90036-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：93 / 98

页数：6

共 10 条

[1]

AHN J, 1987, ADHESION MEASUREMENT, P134

[2] A MICROTRIBOMETER FOR MEASUREMENT OF FRICTION AND ADHESION OF COATINGS [J].

BABA, S ;

KIKUCHI, A ;

KINBARA, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :3015-3018

[3] FRICTION MEASUREMENT OF COATED SURFACES WITH A VIBRATED DIAMOND STYLUS [J].

BABA, S ;

KIKUCHI, A ;

KINBARA, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1860-1862

[4]

BENJAMIN P, 1963, P R SOC LONDON A, V274, P177

[5]

CHOPRA KL, 1969, THIN FILM PHENOMENA, P320

[6]

HALLING J, 1984, PRINCIPLES TRIBOLOGY, P39

[7]

Kikuchi A., 1984, Journal of the Vacuum Society of Japan, V27, P448, DOI 10.3131/jvsj.27.448

[8]

Kikuchi A., 1987, Journal of the Vacuum Society of Japan, V30, P471, DOI 10.3131/jvsj.30.471

[9] ADHESION MEASUREMENT OF METAL-FILMS ON A SI(111) SURFACE BY A MICROTRIBOMETER [J].

KINBARA, A ;

BABA, S ;

KIKUCHI, A .

JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 1988, 2 (01) :1-10

[10] A REVIEW OF ADHESION TEST METHODS FOR THIN HARD COATINGS [J].

VALLI, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :3007-3014

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