GAS-SENSING PROPERTIES OF ULTRATHIN ZINC-OXIDE FILMS

被引:34
作者
YAMAZAKI, T
WADA, S
NOMA, T
SUZUKI, T
机构
[1] Department of Applied Chemistry, Faculty of Technology, Tokyo University of Agriculture and Technology, Tokyo, 184, 2-24-16 Nakamachi, Koganeishi
关键词
D O I
10.1016/0925-4005(93)85106-K
中图分类号
O65 [分析化学];
学科分类号
070302 [分析化学]; 081704 [应用化学];
摘要
[No abstract available]
引用
收藏
页码:594 / 595
页数:2
相关论文
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[2]
HIGH GAS SENSITIVITY OF TIN OXIDE ULTRATHIN FILMS DEPOSITED ON GLASSES AND ALUMINA SUBSTRATES [J].
SUZUKI, T ;
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NOMA, T .
JOURNAL OF MATERIALS SCIENCE, 1991, 26 (23) :6419-6422
[3]
ION-BEAM SPUTTERING APPARATUS FOR DEPOSITION OF MULTILAYERED FILMS [J].
SUZUKI, T ;
YAMAZAKI, T ;
TAKAHASHI, K ;
KAGEYAMA, T ;
ODA, H .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1988, 7 (01) :79-80