ION-BEAM SPUTTERING APPARATUS FOR DEPOSITION OF MULTILAYERED FILMS

被引：17

作者：

SUZUKI, T

YAMAZAKI, T

TAKAHASHI, K

KAGEYAMA, T

ODA, H

机构：

[1] Tokyo Univ of Agriculture &, Technology, Koganei, Jpn, Tokyo Univ of Agriculture & Technology, Koganei, Jpn

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1988年 / 7卷 / 01期

关键词：

D O I：

10.1007/BF01729923

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：79 / 80

页数：2

共 8 条

[1] STRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY
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ESAKI, L
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SCHUL, G
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (05): : 655 - 662
[2] INTERFACE MAGNETISM OF FE-SB MULTILAYERED FILMS WITH ARTIFICIAL SUPERSTRUCTURE FROM FE-57 AND SB-121 MOSSBAUER-SPECTROSCOPY, NEUTRON-DIFFRACTION AND FMR EXPERIMENTS
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[3] ION-BEAM SPUTTERING APPARATUS FOR FABRICATION OF COMPOSITIONALLY MODULATED MATERIALS
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GREER, AL
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BELL, JL
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (07) : 1340 - 1343
[4] ION-BEAM SPUTTERING APPARATUS WITH A SIMPLIFIED ACCELERATOR SYSTEM FOR DEPOSITION OF THIN-FILMS
SUZUKI, T
YAMAZAKI, T
YOSHIOKA, H
TAKAHASHI, K
KAGEYAMA, T
[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1987, 6 (04) : 437 - 438
[5] PREPARATION OF MULTI-LAYERED TUNGSTEN-CARBON FILMS BY ION-BEAM SPUTTERING
TAKEI, K
MAEDA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1985, 24 (10): : 1366 - 1367
[6] FORMATION OF ARTIFICIAL SUPERLATTICE COMPOSED OF ULTRATHIN LAYERS OF COO AND NIO BY REACTIVE EVAPORATION
TERASHIMA, T
BANDO, Y
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (12) : 3445 - 3450
[7] SPUTTERING SYSTEM FOR THE PREPARATION OF COMPOSITIONALLY MODULATED FILMS
TOGAMI, Y
MORISHITA, T
TSUSHIMA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (04): : 635 - 636
[8] YOKOYAMA S, 1890, J APPL PHYS, V51, P547

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