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PREPARATION OF MULTI-LAYERED TUNGSTEN-CARBON FILMS BY ION-BEAM SPUTTERING

被引：7
作者：
TAKEI, K
MAEDA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1985年 / 24卷 / 10期
关键词：
D O I：
10.1143/JJAP.24.1366
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1366 / 1367
页数：2
相关论文
共 6 条
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