SMOOTH MULTILAYER FILMS SUITABLE FOR X-RAY MIRRORS

被引:63
作者
HAELBICH, RP [1 ]
SEGMULLER, A [1 ]
SPILLER, E [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.90743
中图分类号
O59 [应用物理学];
学科分类号
摘要
Multilayer coatings consisting of very smooth ReW and carbon films used as near-normal-incidence reflectors show theoretical performance in the 150-200-Å wavelength region and should allow the fabrication of useful normal-incidence mirrors for wavelengths as short as 50 Å.
引用
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页码:184 / 186
页数:3
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