OPTICAL-ABSORPTION SPECTRUM OF HYDROGENATED AMORPHOUS-SILICON USING PHOTO-PYROELECTRIC SPECTROSCOPY

被引:6
作者
FAN, J
KAKALIOS, J
机构
[1] School of Physics and Astronomy, University of Minnesota, Minneapolis
关键词
D O I
10.1063/1.354784
中图分类号
O59 [应用物理学];
学科分类号
摘要
The optical absorption coefficient alpha of doped and undoped hydrogenated amorphous silicon (a-Si:H) has been measured for photon energies from 2.2 to 1.0 eV using photo-pyroelectric spectroscopy (PPES). A simplified experimental setup and analysis for extracting alpha from the PPES data are described. In PPES the temperature rise induced in the a-Si:H thin film due to weakly absorbed light is detected via a pyroelectric polymer in thermal contact with the sample. This technique presently has a sensitivity of alphad > 10(-3), where d is the sample thickness.
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页码:1799 / 1804
页数:6
相关论文
共 26 条
[1]  
ABELES F, 1967, ADV OPTICAL TECHNIQU, pCH5
[2]   A STUDY OF PLASMA-FILM INTERACTIONS IN HE/H2, AR/H2, AND XE/H2 RADIO-FREQUENCY SPUTTERED A-SI-H [J].
ALBERS, ML ;
SHINAR, J ;
SHANKS, HR .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (04) :1859-1872
[3]  
AMER NM, 1984, SEMICONDUCT SEMIMET, V21, P83
[4]   INFRARED REAL-TIME-NORMALIZED PHOTOPYROELECTRIC MEASUREMENTS OF CRYSTALLINE GERMANIUM - INSTRUMENTATION AND SPECTROSCOPY [J].
CHRISTOFIDES, C ;
MANDELIS, A ;
GHANDI, K ;
WAGNER, RE .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (09) :2360-2367
[5]   OPTICAL-ABSORPTION COEFFICIENT AND NONRADIATIVE QUANTUM EFFICIENCY PHOTOPYROELECTRIC SPECTRA OF PURE CRYSTAL SILICON FROM A SINGLE MODULATION FREQUENCY [J].
CHRISTOFIDES, C ;
ENGEL, A ;
MANDELIS, A .
FERROELECTRICS, 1991, 118 (1-4) :411-424
[6]   QUANTITATIVE PHOTOPYROELECTRIC OUT-OF-PHASE SPECTROSCOPY OF AMORPHOUS-SILICON THIN-FILMS DEPOSITED ON CRYSTALLINE SILICON [J].
CHRISTOFIDES, C ;
MANDELIS, A ;
ENGEL, A ;
BISSON, M ;
HARLING, G .
CANADIAN JOURNAL OF PHYSICS, 1991, 69 (3-4) :317-323
[7]   DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON [J].
CODY, GD ;
TIEDJE, T ;
ABELES, B ;
BROOKS, B ;
GOLDSTEIN, Y .
PHYSICAL REVIEW LETTERS, 1981, 47 (20) :1480-1483
[8]   PHOTOTHERMAL SPECTROSCOPY USING A PYROELECTRIC THIN-FILM DETECTOR [J].
COUFAL, H .
APPLIED PHYSICS LETTERS, 1984, 44 (01) :59-61
[10]   PYROELECTRIC CALORIMETER FOR PHOTOTHERMAL STUDIES OF THIN-FILMS AND ADSORBATES [J].
COUFAL, HJ ;
GRYGIER, RK ;
HORNE, DE ;
FROMM, JE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05) :2875-2889